METHOD AND APPARATUS FOR TREATMENT OF EXHAUST GAS

摘要

An apparatus for the treatment of an exhaust gas, wherein an exhaust gas being sucked and guided by a fan (16) passes, at first, through a layer activated carbon deodorization filter (12) as a pre-filter and an odoriferous material in a gas phase and/or a steam phase associated therewith is removed therefrom, and then the exhaust gas passes through a bagfilter (14) to thereby remove a dust and the like. Since an odoriferous material having strong adhesiveness in a gas phase and/or a steam phase has been already removed from the exhaust gas entering into the bagfilter (14) by the above pre-filter (12), the bagfilter (14) is prevented from being clogged in an early stage. The above apparatus can be suitably used for treating an exhaust gas generated from a semiconductor manufacturing line, an ICD manufacturing line, or the like.