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发明名称
Prüfgerät für elektronische Bauelemente
摘要
申请公布号
DE10297713(T5)
申请公布日期
2006.06.22
申请号
DE20021097713T
申请日期
2002.04.25
申请人
ADVANTEST CORP., TOKIO/TOKYO
发明人
HIROTO, NAKAMURA
分类号
G01R31/26;G01R31/28;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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