| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the definition of an exposure image from being impaired caused by the fluctuation in a propagation direction of light which images a pixel unit of a spatial optical modulation element in an image exposure apparatus comprising a combination of a spatial optical modulation element and a microlens array. <P>SOLUTION: The image exposure apparatus is equipped with a spatial optical modulation element 50 such as a DMD (digital mirror device) comprising a large number of two-dimensionally arranged pixels each modulating irradiation light, a light source 66 to irradiate the spatial modulation element 50 with light B, and an imaging optical system 52, 54 to condense the light B from the spatial optical modulation element 50 to image the above pixels, wherein an aperture array 59 is installed in the imaging position by the imaging optical system 52, 54 in such a manner that images in the pixels are positioned at the respective apertures 59a. The images in the apertures of the aperture array 59 are imaged by a microlens array 55 and projected onto a photosensitive material 150 by an optical system 57, 58. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
