| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method and instrument capable of measuring precisely a refractive index distribution (homogeneity) of a specimen, in particular, a higher order component of homogeneity. <P>SOLUTION: In this measuring method, reflected light from a reference plate is brought into interference with reflected light(s) from the specimen and/or a reflection plate to measure the refractive index distribution of the specimen. The method has a step for regulating a position/positions of the specimen and/or the reflection plate to conform a position/positions of the light(s) on the the specimen and/or the reflection plate when the specimen is arranged between the reference plate and the reflection plate, with a position/positions of the light(s) on the the specimen and/or the reflection plate when the specimen is not arranged between the reference plate and the reflection plate. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
