| 摘要 |
The electronic device comprises a plurality of layout regions each including a plurality of patterns defined by a buried structure buried in a substrate. For each of the layout regions, in each of the layout regions, the minimum space between the patterns, and a maximum area percentage allowed for the patterns in the layout region are defined based on a size of the layout region. In larger one of the layout regions, the minimum space between the patterns in the region is set larger.
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