USE OF VISCO-ELASTIC POLYMER TO REDUCE ACOUSTIC AND/OR VIBRATION INDUCED ERROR IN MICROELECTROMECHANICAL DEVICES AND SYSTEMS

摘要

A system and method for reducing rectification error in a MEMS device cause by noise and/or vibration. A visco-elastic polymer is situated around at least part of the MEMs device, wherein the visco-elastic polymer converts at least some of the acoustic and/or vibration energy into heat, thereby reducing effects of the external acoustic and/or vibration energy on the MEMS device.