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发明名称
WAFER LOADER
摘要
申请公布号
KR20060069640(A)
申请公布日期
2006.06.22
申请号
KR20040107488
申请日期
2004.12.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KO, YONG SEOK
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
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地址
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