| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a styrene derivative excellent in copolymerizability with other monomers and capable of being easily synthesized by a common polymerization means, a polymer using the styrene derivative and being soluble in an alkali before being heated and excellent in alkali resistance after being heated, and its production method and to provide a pattern forming material using the polymer and being soluble in an alkali and excellent in developability and storage stability before being developed and excellent in alkali resistance and insulation properties after being developed, a high-precision permanent pattern, and its efficient formation method. <P>SOLUTION: The styrene derivative represented by formula (1) or formula (2) is obtained. The polymer is synthesized from the styrene derivative, the pattern forming material is formed from the polymer, and the permanent pattern is formed from the pattern forming material. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
