| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a variable capacitor for reducing fluctuation to a designed capacity value, for realizing a stable capacity value even when any vibration or noise from the outside is present, for realizing a desired capacity value even when it is integrated into an electronic circuit, and for realizing high productivity and scale reduction as a whole electronic circuit. <P>SOLUTION: A lower electrode 2 is formed on a substrate 1, an upper electrode 4 is arranged so as to be faced to the lower electrode 2, and an insulating support member 3 for dividing the upper electrode 4 into a plurality of movable regions and for displacing each of them to the lower electrode 2 side is arranged between the lower electrode 2 and the upper electrode 4. The lower electrode 2 is constituted of a plurality of first lower electrodes 2a each of which is partially faced to the movable regions, and to which a control voltage for driving the movable regions is applied; and a plurality of second lower electrodes 2b which are separated from the first lower electrodes 2a, and at least are partially faced to the movable regions for forming a capacity with the movable regions. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
