| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition for developing a photosensitive resin such as a resist without corroding aluminum. SOLUTION: This development composition comprising a combination of components including a basic substance such as sodium hydroxide, an alkaline earth metal salt such as calcium chloride, and polyacrylic acid can be used without corroding aluminum or without depositing a hydroxide of the alkaline earth metal salt as a precipitate. The composition preferably contains the basic substance of 0.01 to 20 wt.%, the alkaline earth metal salt of 0.001 to 5 wt.%, the polyacrylic acid of 0.001 to 5 wt.% and water of 70 to 99.99 wt.%. COPYRIGHT: (C)2006,JPO&NCIPI |
