发明名称 APPLICATOR FOR PRODUCING ORGANIC EL DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an applicator capable of producing an organic EL display device of high quality. SOLUTION: The applicator is provided which applies organic EL material or hole-transporting material on a substrate 7. The applicator comprises a stage 4 on which the substrate 7 is mounted, a heater 41 which is installed in the stage and heats it, a controlling device which controls the heater 41 so that the substrate 7 mounted on the stage 4 is heated up to the temperature suitable for conveyance, and a nozzle unit 2 which lets a treatment liquid run down to the substrate 7 mounted on the stage 4. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006164905(A) 申请公布日期 2006.06.22
申请号 JP20040358452 申请日期 2004.12.10
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KAWAGOE MICHIFUMI;MASUICHI MIKIO;TAKAMURA YUKIHIRO;YOSHIDA JUNICHI
分类号 H05B33/10;B05C5/00;B05C9/14;H01L51/50 主分类号 H05B33/10
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