发明名称 |
APPLICATOR FOR PRODUCING ORGANIC EL DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an applicator capable of producing an organic EL display device of high quality. SOLUTION: The applicator is provided which applies organic EL material or hole-transporting material on a substrate 7. The applicator comprises a stage 4 on which the substrate 7 is mounted, a heater 41 which is installed in the stage and heats it, a controlling device which controls the heater 41 so that the substrate 7 mounted on the stage 4 is heated up to the temperature suitable for conveyance, and a nozzle unit 2 which lets a treatment liquid run down to the substrate 7 mounted on the stage 4. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2006164905(A) |
申请公布日期 |
2006.06.22 |
申请号 |
JP20040358452 |
申请日期 |
2004.12.10 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
KAWAGOE MICHIFUMI;MASUICHI MIKIO;TAKAMURA YUKIHIRO;YOSHIDA JUNICHI |
分类号 |
H05B33/10;B05C5/00;B05C9/14;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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地址 |
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