| 摘要 |
PROBLEM TO BE SOLVED: To increase flatness by restraining warpage generated in a metal mask unit without enhancing rigidity by increasing the thickness of a frame, in a metal mask unit having a structure where a metal mask with tension applied thereto is fixed to a window frame-like frame. SOLUTION: This metal mask unit 10 composed by mounting, on the surface of the window frame-like frame 13, the metal mask 11 with tension longitudinally and laterally applied thereto is so structured that the warpage of the frame 13 is restrained by mounting metal tapes 17 and 18 with tension applied thereto to back faces of four sides of the frame 13. COPYRIGHT: (C)2006,JPO&NCIPI
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