| 摘要 |
PROBLEM TO BE SOLVED: To realize a laser microscope and a color laser microscope with which a high resolution sample image is picked up without using an expensive acoustic optical element. SOLUTION: In the laser microscope, a line shaped optical beam generator (12) is used to convert laser beams into non-coherent optical beams that have divergence along one direction. Laser beams generated from laser light sources (1, 2 and 3) are converted into light beams having divergence along one direction by the line shaped optical beam generator (12) and are projected onto a sample (25) through a beam deflector (18) to scan the surface of the sample. Then, reflected beams from the sample are received by a linear image sensor (26), for example, to generate a video output. A micro-mirror device, in which a plurality of micro-mirror elements are arranged in a two dimensional array shape, is used as the line shaped optical beam generator. Incident laser beams are converted into optical beams which are vibrated along one direction at a high speed by the reciprocating rotation of each micro-mirror and diverging optical beams are generated. COPYRIGHT: (C)2006,JPO&NCIPI
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