| 摘要 |
<p>A charged particle beam (2) entering a final deflection electromagnet (7) through quadrapole electromagnets (4, 5, 6) advances through the final deflection electromagnet (7) arcuately by increasing/decreasing a deflection electromagnetic field occurring in the final deflection electromagnet (7), for example, with a predetermined period and is scanned with the X-direction component included. The charged particle beam (2) scanned with the X-direction component included is scanned with the Y-direction component included while it passes through a Y-direction wobbler electromagnet (8). Consequently, the charged particle beam (2) is scanned with the X-direction component and the Y-direction component included, and a target (9) is irradiated with the charged particle beam (2) so as to describe a circle, for example.</p> |
