发明名称 |
DEVICE FOR THE TEMPERED STORAGE OF A CONTAINER |
摘要 |
The invention relates to a device for the tempered storage of a container (19) for receiving condensed materials that are transported out of the container (19) by evaporation by means of a carrier gas guided through the container. Said device comprises a housing (3) forming a chamber (25), the wall (3) of said housing being embodied in a heat-insulating manner, a passage (20, 21) in the housing wall (3) for a gas supply line or gas evacuation line (17, 18) to, or from, the container (19) arranged in the chamber (25), and a heating (16) or cooling system for tempering the chamber (25). The invention is characterised in that a gas flow producer (4) and the gas flow guiding means (5-10) guiding the gas flow produced by the gas flow producer (4) are provided in the chamber (25), the gas flow produced by the gas flow producer and formed by the gas flow guiding means (5-10) being heated by the heating system (16) and flowing alongside the container (19). |
申请公布号 |
WO2006063956(A2) |
申请公布日期 |
2006.06.22 |
申请号 |
WO2005EP56519 |
申请日期 |
2005.12.06 |
申请人 |
AIXTRON AG;REINHOLD, MARKUS;STRAUCH, GERHARD, KARL |
发明人 |
REINHOLD, MARKUS;STRAUCH, GERHARD, KARL |
分类号 |
C23C14/22 |
主分类号 |
C23C14/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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