PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE SYSTEM, AND EXPOSURE METHOD

摘要

A projection optical system (PL) where an image on a first surface (M) is formed on a second surface (P). The projection optical system (PL) has at least one first wedge prism (4) where an incident surface and an exit surface have flat surfaces, the flat surface of the incident surface and the flat surface of the exit surface having a predetermined first wedge angle. The first wedge prism (4) is rotatable substantially about Y-axis, where Z-axis is in the direction normal to the first surface (M), X-axis is in the direction of a line at which the flat surface of the incident surface and the flat surface of the exit surface cross, and Y-axis is in the direction orthogonal to Z-axis and X-axis.