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发明名称
TRAPPING APPARATUS FOR SEMICONDUCTOR RESIDUAL PRODUCT
摘要
申请公布号
KR100595010(B1)
申请公布日期
2006.06.22
申请号
KR20060007565
申请日期
2006.01.25
申请人
LEE, SEUNG YONG;INOSYSTEM CO., LTD.;NA, MYUNG SOO
发明人
LEE, SEUNG YONG;NA, MYUNG SOO
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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