| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow control valve and a gas treatment system which can mechanically stably adjust the flow rate of a fluid, and moreover are suitable for adjusting the mass flow of the fluid. <P>SOLUTION: The flow control valve 23 is provided with a housing 41 having an upstream side port 51 and a downstream side port 52, and a spool 43 formed slidable axially in the housing 41. The housing 41 includes a circulation space 61 communicating with the upstream side port 51 and the downstream side port 52 with an inner wall 42 and the spool 43, an upstream side pressure space 62, and a downstream side pressure space 63. The spool 43 is moved axially by the pressure difference between the upstream side pressure space 62 and the downstream side pressure space 63. The area of the opening of the upstream side port 62 varies according to the movement of the spool 43. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
