| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for acquiring a pattern image without any blur by causing an imaging unit to scan along a flexure so as to keep a focus position from being displaced even if the flexure is widthwise developed in a film workpiece, as to a pattern inspection device for a film workpiece wherein the long film workpiece is widthwise scanned by the imaging unit to acquire the pattern image formed on the film workpiece for inspection. SOLUTION: A distance sensor is provided in the vicinity of the imaging unit for measuring a distance to a surface of the workpiece. When the imaging unit is moved widthwise across the workpiece while scanning, the imaging unit is moved so that the distance to the workpiece coincides with a focal distance based on distance information from the distance sensor. It is also possible to move the film workpiece. COPYRIGHT: (C)2006,JPO&NCIPI
|
