| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-channel of improved formation precision of the depth for forming one or more micro-channels serving as a passage for a liquid, on a substrate. SOLUTION: The micro-channel is formed with a type-N silicon layer 2 having, over the layer, a type-P silicon layer 3 of a thickness corresponding to the depth of a to-be-formed micro-channel by anodizing the type-P silicon layer 3 selectively and removing the porous silicon area 11 selectively with a gas or chemical. COPYRIGHT: (C)2006,JPO&NCIPI
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