发明名称 |
Method of forming branched structures |
摘要 |
The present invention provides a method of forming a branched structure which comprises applying colloidal-sized particles over structures. The coated structures are then etched such that the structures are etched through the colloidal particles to form branched structures. The etch may be a reactive ion etch. The structures may be microstructures formed as high aspect ratio microstructures. The colloidal-sized particles may be applied as a colloidal solution and a polyelectrolyte (PE) layer may be applied to the microstructures prior to the colloidal solution to promote adsorption of the colloidal particles.
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申请公布号 |
US2006131265(A1) |
申请公布日期 |
2006.06.22 |
申请号 |
US20040015116 |
申请日期 |
2004.12.17 |
申请人 |
SAMPER VICTOR D;YI DONG-KEE;KUSTANDI TANU S |
发明人 |
SAMPER VICTOR D.;YI DONG-KEE;KUSTANDI TANU S. |
分类号 |
C23F1/00;B44C1/22;C03C25/68 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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