发明名称 METHOD AND DEVICE FOR OPERATING A PLASMA DEVICE
摘要 The invention relates to a method for operating a plasma device (100) in which particles (2) are arranged in a plasma. According to said method, electrical progressive waves (1) are generated, under the action of which the particles (2) in the plasma device (100) carry out an oriented movement towards at least one pre-determined collection region (20, 20A). The invention also relates to a plasma device for carrying out the inventive method.
申请公布号 WO2006063738(A1) 申请公布日期 2006.06.22
申请号 WO2005EP13233 申请日期 2005.12.09
申请人 MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V.;MORFILL, GREGOR;THOMAS, HUBERTUS, M.;KONOPKA, UWE;JACOB, WOLFGANG;ANNARATONE, BEATRICE;FINK, MARTIN;SATO, NORIYOSHI;SHIMIZU, TETSUJI;STUFFLER, TIMO 发明人 MORFILL, GREGOR;THOMAS, HUBERTUS, M.;KONOPKA, UWE;JACOB, WOLFGANG;ANNARATONE, BEATRICE;FINK, MARTIN;SATO, NORIYOSHI;SHIMIZU, TETSUJI;STUFFLER, TIMO
分类号 H01J37/32 主分类号 H01J37/32
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