| 摘要 |
This invention relates to a vapor phase reagent dispensing apparatus or assembly having a liquid reagent level sensor for sensing liquid reagent level in the apparatus interior volume and a temperature sensor for sensing temperature of the liquid reagent in the apparatus interior volume. The floor of the apparatus has a cavity therein extending downwardly from the surface of the floor, and the lower ends of the liquid reagent level sensor and temperature sensor are positioned in the cavity. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices, and achieves a high level of withdrawal of the liquid reagent from the vessel.
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