发明名称 CERTIFIED CELL AND METHOD OF USING CERTIFIED CELL FOR FABRICATING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a certified cell and a method of using a certified cell for fabricating a device. <P>SOLUTION: A method for using a cell library to create a device includes a step of projecting a series of masks 218, 220, 222, each mask corresponding to a layer of each of one or more selected cells, onto a substrate according to a data layout 214 of the device; or a step of combining a series of masks, each mask corresponding to a layer of one or more of selected cells, into a series of global masks, each embodying a layer of the device according to a data layout of the device. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006163397(A) 申请公布日期 2006.06.22
申请号 JP20050348649 申请日期 2005.12.02
申请人 ASML NETHERLANDS BV 发明人 DAVID CUMMINGS KEVIN
分类号 G03F1/08;G03F7/20;H01L21/027 主分类号 G03F1/08
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