| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the hermeticity with high accuracy in a short time even with a little emission of He at the time of evaluating the hermeticity of a hermetically sealed package, etc. which has a high degree of hermeticity and therefore is difficult to evaluate by the He leakage measurement method. SOLUTION: Inside a chamber 1, the package 2 wherein a semiconductor device such as a diode impregnated with He gas is sealed is arranged. A spiral pipe 4 which is a gas selection pipe which causes a difference in speed depending on the type of gas is connected to the chamber 1. To the other end of the spiral pipe 4, a He leakage detector 6 which is a gas detector for detecting the He gas emitted from the package 2 is connected. COPYRIGHT: (C)2006,JPO&NCIPI
|
