| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for easily and inexpensively producing gaseous nitrogen of high purity not containing gaseous oxygen. SOLUTION: Gas 202 of a low oxygen content is produced by sending compressed air 301 to a gas separation membrane 10 for separating gas by utilizing the difference in the amount of permeation to the membrane of gaseous components and the gaseous nitrogen 205 of relatively high purity containing the gaseous oxygen in a content of 0% and containing a slight amount of steam and gaseous hydrogen is produced by adding gaseous hydrogen 203 to the gas and bringing the gas into contact with a catalyst 41; further, the steam and hydrogen enriched gases 303 and 304 are eliminated by passing the gases through the gas separation membranes 50, 60, and thereby, the gaseous nitrogen 305 of high purity is obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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