发明名称 |
Measurement of critical dimensions using X-ray diffraction in reflection mode |
摘要 |
A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.
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申请公布号 |
US2006133570(A1) |
申请公布日期 |
2006.06.22 |
申请号 |
US20040018352 |
申请日期 |
2004.12.22 |
申请人 |
JORDAN VALLEY APPLIED RADIATION LTD |
发明人 |
MAZOR ISAAC;YOKHIN BORIS |
分类号 |
G01N23/20 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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