| 摘要 |
PROBLEM TO BE SOLVED: To provide an air sliding device with a table movable with low friction while avoiding such an inconvenience that there is a difference in parallelism between two rails and/or somewhat warp on the rails. SOLUTION: The air sliding device 1 comprises two rails 2, 3 arranged in parallel with a predetermined space kept therebetween and formed of round rods, air bearings 5 mounted on the outer peripheral faces of the rails 2, 3, respectively, and each having an inner peripheral face 26 which forms an annular gap between the outer peripheral face 4 and itself in cooperation with the outer peripheral face 4, elastic supports 6 fixed to the air bearings 5, respectively, and a table 7 fixed to the elastic supports 6 for connecting the air bearings 5 to each other. COPYRIGHT: (C)2006,JPO&NCIPI
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