发明名称 PREPARING AND OPERATING A VAPORIZER BODY FOR A PVD METALLIZATION INSTALLATION
摘要 The invention relates to the preparation and operation of a vaporizer body in a PVD metallization installation for continuously supplying and vaporizing metal. A layer structure applied to the vaporizer body is, together with sinterable powder material in the unsintered state, fed to the metal, is applied in the form of a crude layer structure to the vaporizer body and is sinter-fused thereto in the metallization cycle by heating the vaporizer body. The layer structure can be used during the metallization process and can be renewed directly in the metallization installation after each metallization cycle.
申请公布号 WO2006029615(A3) 申请公布日期 2006.06.22
申请号 WO2005DE01631 申请日期 2005.09.16
申请人 SINTEC KERAMIK GMBH & CO. KG;NUERNBERGER, MICHAEL;MAIZINGER, RUDOLF;GOETZ, ULRICH 发明人 NUERNBERGER, MICHAEL;MAIZINGER, RUDOLF;GOETZ, ULRICH
分类号 C23C14/24 主分类号 C23C14/24
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