| 摘要 |
PROBLEM TO BE SOLVED: To provide a film separating device, efficiently perform separating work and recovery work for a protective film, and restraining lowering of yield. SOLUTION: This film separating device 1 includes: a base plate support part 41; a tape sticking mechanism 5; and a film separating mechanism 4. The base plate support part 41 supports two base plates 15 adjacent to each other with the base plate end parts close to each other. The tape sticking mechanism 5 sticks a tape 31 to connect the protective films 12 to each other at the base plate end parts. The film separating mechanism 4 sequentially lifts up the protective films 12 connected by sticking the tape 31 thereto through the tape 31, thereby continuously separating the protective films 12. COPYRIGHT: (C)2006,JPO&NCIPI
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