| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator capable of realizing sufficient carrier performance, simple in structure and suitable for miniaturization in carrying an object by a progressive wave. SOLUTION: A flexible substrate 14 is fixed on an actuator substrate 11 by overlapping it, a plurality of telescopic driving elements 12 are fixed in parallel on the flexible substrate 14, An elastic member 13 is placed and locked on an upper end of each of the telescopic driving elements 12 and a control driving part 15 is connected to each of the telescopic driving elements 12 through the flexible substrate 14. The control driving part 15 forms the progressive wave the progressing direction of which is an X direction by sequentially applying voltage to each of the telescopic driving elements 12 through the flexible substrate 14, sequentially expanding and contracting each of the telescopic driving elements 12 in a Z direction and deforming the elastic member 13 into wavy form. When an object is placed on this elastic member 13, the object is carried in a reverse direction to the X direction by the progressive wave of this elastic member 13. COPYRIGHT: (C)2006,JPO&NCIPI
|
