APPARATUS FOR TESTING RELIABILITY OF SEMICONDUCTOR SAMPLE

摘要

Provided is a apparatus for testing reliability of a semiconductor sample including: a sample mounting part for mounting the semiconductor sample on an upper center part thereof, and mounting components having an evaluation circuit board at an upper peripheral part thereof; a heating block formed to have a tip shape and mounted on a lower part of the semiconductor sample to maintain a test temperature; a cooling block separated from the heating block and surrounding the heating block to cool the temperature of the components; and a fixing block for raising and lowering the semiconductor sample.