发明名称 NON-CONTACT SUPPORTING DEVICE
摘要 PROBLEM TO BE SOLVED: To ensure original effects in a high-accuracy flotation region while suppressing a great increase in cost. SOLUTION: Between a high-accuracy floating suction mixing part 5 having a relatively fixed floating amount and a low-accuracy floating table 3, a porous floating part 4 is provided having medium accuracy. A difference in accuracy between flotation on the floating suction mixing part 5 and flotation on both sides is therefore reduced. Thus, high-accuracy flotation is less influenced by low-accuracy flotation. The provision of the porous floating part less increases cost than the expansion of the floating suction mixing part 5. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006161940(A) 申请公布日期 2006.06.22
申请号 JP20040353551 申请日期 2004.12.07
申请人 CKD CORP 发明人 ITO MASA;YAMADA DAIKI
分类号 F16C32/06 主分类号 F16C32/06
代理机构 代理人
主权项
地址