| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of quickly and precisely positioning a carriage in an improved type based on the latest technique. SOLUTION: The positioning device is equipped with at least on displaceable carriage 10, liquid sliding bearings 12a, 16a ; 12b, 16b on which the carriage is displaceable, and a carriage driving part. The latter is equipped with a first linear motor which is at a first main part 20a and its opposite side, and equipped with a first subsidiary part 21a positioned at a first plane 19a, and a second linear motor which is at a second main part 20b and its opposite side, and a second subsidiary 21b positioned at a second plane 19b. Two linear motors are disposed at an inclined position so that two planes are different so as to form an intersection angle. COPYRIGHT: (C)2006,JPO&NCIPI
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