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发明名称
MICRO STAGE USING PZT
摘要
申请公布号
KR20060068511(A)
申请公布日期
2006.06.21
申请号
KR20040107224
申请日期
2004.12.16
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
CHOI, SANG KUK;KIM, DAE JUN;JEONG, JIN WOO;KIM, DAE YONG
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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