| 摘要 |
Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing (110) formed with a vacuum chamber (111), a driving shaft (130, 140) having an outer cylindrical surface (130b, 140b) and movably extending in the vacuum chamber (111) of the vacuum casing (110), and a sealing ring (153, 163) in the form of an annular ring shape and including a sealing lip (154c, 164c) held in contact with the outer cylindrical surface (130b, 140b) of the driving shaft (130, 140), an annular spring member (155, 165) operative to impart a force to the sealing lip (154c, 164c) to ensure that the sealing lip (154c, 164c) is held in tight contact with the outer cylindrical surface (130b, 140b) of the driving shaft (130, 140), and a peripheral portion (154b, 164b) radially outwardly extending from the sealing lip (154c, 164c), in which the outer cylindrical surface (130b, 140b) of the driving shaft (130, 140) is smaller in surface roughness Ra than 0.1 ( mu m). <IMAGE> |
