发明名称 |
Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity |
摘要 |
A sample image display method and an image shift sensitivity measuring method to be executed in a charged particle beam apparatus are provided for accurately correcting an image drift in any observing and analyzing condition such as an accelerating voltage, a working distance or a raster rotation. When obtaining a reference image used for detecting a drift, the process is executed to obtain an image having the different image shift amount from that of the reference image at a time and to occasionally measure an image shift sensitivity. Then, the process is executed to automatically register this reference image and the image shift sensitivity and to detect a drift amount and control an image shift (correct a drift) according to the registered conditions when correcting the drift.
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申请公布号 |
EP1672672(A2) |
申请公布日期 |
2006.06.21 |
申请号 |
EP20050027647 |
申请日期 |
2005.12.16 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OGASHIWA, TAKESHI;SATO, MITSUGU;TAKANE, ATSUSHI, |
分类号 |
H01J37/22 |
主分类号 |
H01J37/22 |
代理机构 |
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