| 摘要 |
A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion (10) the lower end of which is fixed to a substrate (16); a beam portion (12) on which a detection element (13) for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion; a suspended weight (11) connected to the other end of the beam portion (12); and a stopper substrate (15) with a window portion through which, in order to guide an output signal of the detection element (13) via a pad (14) that is formed on the upper end face of the support portion (10), a conductor lead (5) that is connected to the pad passes. Overswing of the weight (11) is limited by means of the stopper substrate (15). |
