SPM-probe with an EBD-tip.

摘要

The sensor has a holding portion (2) provided at one end of a cantilever (3). A sensor tip (4) is provided at other end of the cantilever, and a partially cylindrical electro beam induced deposition (EBD) scanning tip is protruding from the sensor tip. The portion serves for receiving and fastening the sensor on a measuring head of a scanning probe microscope. The cantilever bears the sensor tip with the EBD scanning tip. An independent claim is also included for a method for producing a scanning probe microscope (SPM) sensor.