发明名称 |
Abrasive machine and method of abrading work piece |
摘要 |
The abrasive machine is capable of feeding a proper amount of slurry and preventing a work piece from sticking on an upper abrasive plate. The abrasive machine comprises: the upper abrasive plate abrading an upper face of the work piece and having a plurality of slurry holes for feeding the slurry to the work piece; a lower abrasive plate abrading a lower face of the work piece; a slurry feeding unit pressurizing and feeding the slurry; a plurality of slurry paths respectively connecting the slurry holes to the slurry feeding unit; a plurality of valve mechanisms respectively provided to the slurry paths so as to control flows of the slurry; and a control section for controlling the valve mechanisms. |
申请公布号 |
EP1413396(B1) |
申请公布日期 |
2006.06.21 |
申请号 |
EP20030256713 |
申请日期 |
2003.10.23 |
申请人 |
FUJIKOSHI MACHINERY CORPORATION |
发明人 |
MORIYA, NORIHIKO |
分类号 |
B24B57/02;B24B37/00;H01L21/304 |
主分类号 |
B24B57/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|