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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR20060069246(A)
申请公布日期
2006.06.21
申请号
KR20050102114
申请日期
2005.10.28
申请人
DAI NIPPON SCREEN MFG. CO., LTD.
发明人
NISHIOKA KENTARO
分类号
H01L21/027;G02F1/13
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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OBJECT COLLOCATION
Steam iron
Luminaire
Light emitting diode lamp
LED spotlight
Light emitting diode lamp
