| 摘要 |
<p>The present invention corrects automatically the wrong orientation of a reticle-carrying container (11). The present invention includes a reticle-processing system having the reticle-carrying container (11), transfer means (4,5) for transferring the reticle-carrying container (11), a light exposure apparatus for printing a circuit pattern, and a reticle stocker (2) for keeping a plurality of reticles (12). The present invention also includes orientation change means (81) for detecting the orientation of the reticle-carrying container (11) and changing it appropriately in a path from the reticle stocker (2) to a printing position in the light exposure apparatus (1). The orientation change means (81) includes a rotation drive part (82) for rotating the reticle-carrying container (11), orientation detection means (83) for detecting the orientation of the reticle-carrying container (11), which is provided in some place in the path from the reticle stocker (2) to the printing position in the light exposure apparatus (1), and a control part (84) for, when the orientation detected by the orientation detection means (83) is shifted by 180 degrees, controlling the rotation drive part (82) so as to correct the orientation.</p> |
