发明名称
摘要 PROBLEM TO BE SOLVED: To provide a TFT(thin-film transistor) and its manufacturing method by which ON-state current can be improved by forming a channel in consideration of the crystal structure of a polycrystalline semiconductor film formed of amorphous semiconductor film. SOLUTION: In a TFT 1, a channel formation area 3 is formed of a polycrystalline semiconductor film 301 which is formed by crystallizing an amorphous semiconductor film and has a columnar structure where a column axis A is directed toward the outside of the surface of a board 8. A gate electrode is opposite to a side end face 302 almost parallel to the prism axis A of the polycrystalline semiconductor film 301 constituting the channel formation area 3, with a gate insulation film 6 in between.
申请公布号 JP3788021(B2) 申请公布日期 2006.06.21
申请号 JP19980084656 申请日期 1998.03.30
申请人 发明人
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
代理机构 代理人
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