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发明名称
COMPOSITIONS FOR CLEANING ORGANIC AND PLASMA ETCHED RESIDUES FOR SEMICONDUCTOR DEVICES
摘要
申请公布号
EP1177275(B1)
申请公布日期
2006.06.21
申请号
EP20000932008
申请日期
2000.05.02
申请人
EKC TECHNOLOGY, INC.
发明人
SMALL, ROBERT, J.;CHENG, JUN;MAW, TAISHIH
分类号
C11D7/10;C11D11/00;C11D3/04;C11D3/30;C11D3/32;C11D3/43;C11D7/32;C11D7/34;C11D7/50;G03F7/42
主分类号
C11D7/10
代理机构
代理人
主权项
地址
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