Method and apparatus for measuring the height of an object,申请号EP19970121162-传众专利搜索

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法人/股东/高管

发明名称	Method and apparatus for measuring the height of an object
摘要
申请公布号	EP0848245(B1)	申请公布日期	2006.06.21
申请号	EP19970121162	申请日期	1997.12.02
申请人	HITACHI, LTD.	发明人	HASHIMOTO, YUTAKA;SASAKI, HIDEAKI;KAZUI, SHINICHI
分类号	G01B11/02;G01N21/88;G01B11/06;G01R31/309;H01L21/60	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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