发明名称 |
FLEXURAL PLATE WAVE SENSOR |
摘要 |
<p>A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer, depositing a piezoelectric layer over said membrane layer, forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.</p> |
申请公布号 |
EP1671378(A2) |
申请公布日期 |
2006.06.21 |
申请号 |
EP20040789300 |
申请日期 |
2004.09.30 |
申请人 |
THE CHARLES STARK DRAPER LABORATORY, INC. |
发明人 |
WEINBERG, MARC, S.;CUNNINGHAM, BRIAN;HILDEBRANT, ERIC |
分类号 |
H01L41/08;G01L9/00;G01N29/02;G01N29/22;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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