Reticle-carrying container

摘要

The present invention allows a reticle-carrying container (11) to be fastened in a reticle stocker (2) even if the reticle-carrying container (11) is wrongly oriented. The reticle-carrying container (11) includes an interior with an opening at one end for storing a reticle (12), a door (14) for covering and blocking the opening, and a seal material (15) for sealing the interior hermetically when the door (14) blocks the pod (13). The reticle-carrying container (11) is provided with two pairs of kinematic pin grooves (61) for positioning and fastening the reticle-carrying container (11), which are formed with a 180-degree turn from each other on the outer surface of the door (14). Receiving parts (22) for receiving and holding the kinematic pin grooves (61) are arranged in the positions corresponding to the kinematic pin grooves (61) on the outer surface of the pod (13) so that the two pairs of kinematic pin grooves (61) can be engaged with the pins in the both orientations.