| 摘要 |
This invention provides a liquid injection head capable of preventing breakdown of piezoelectric elements reliably and for a long period of time; a method of producing the same; and a liquid injection device. Further, this invention provides a liquid injection head capable of effectively preventing a decrease in the amount of displacement of a diaphragm due to the driving of a piezoelectric element; a method of producing the same; and a liquid injection device. An arrangement according to this invention comprises a flow channel forming board (10) formed with a pressure generating chamber (12) communicating with the opening in a nozzle delivering liquid drops, and a piezoelectric element (300) consisting of a lower electrode (60) disposed on one surface of the flow channel forming board (10) through a diaphragm, a piezoelectric layer (70), and an upper electrode (80). The pattern region of each layer constituting at least the piezoelectric element (300) is covered by an insulation membrane (100) made of inorganic insulation material.
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