VACUUM PLANT FOR STUDY OF OPTICAL ELECTRONIC DEVICES

摘要

FIELD: optic-electronic, optic-mechanical and vacuum industries; testing optic-electronic and optic-mechanical devices under vacuum and low temperature conditions. ^ SUBSTANCE: proposed plant includes vacuum chamber, cryogetter pump, pre-evacuation vacuum system and control instruments. Vacuum chamber is provided with heat and cryogenic shields; pre-evacuation vacuum system is connected with vacuum chamber by means of vacuum fittings. Plant is also provided with attachment connected with vacuum chamber in its upper part. Cryogetter pump is mounted in this attachment. Overflow ends of pipe lines for delivery of cryogenic agent to cryogenic shield and to optic-electronic device under test are located in upper part of pump vessel. ^ EFFECT: extended range of loads at monitoring of mechanical vibration converters. ^ 1 dwg