| 发明名称 |
Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereof |
| 摘要 |
A composition and method of preparation, to provide silane compounds that are free of chlorine. The compounds are hexakis(monohydrocarbylamino)disilanes with general formula (I) <?in-line-formulae description="In-line Formulae" end="lead"?>((R)HN)<SUB>3</SUB>-Si-Si-(NH(R))<SUB>3</SUB> (I)<?in-line-formulae description="In-line Formulae" end="tail"?> wherein each R independently represents a C<SUB>1 </SUB>to C<SUB>4 </SUB>hydrocarbyl. These disilanes may be synthesized by reacting hexachlorodisilane in organic solvent with at least 6-fold moles of the monohydrocarbylamine RNH<SUB>2 </SUB>(wherein R is a C<SUB>1 </SUB>to C<SUB>4 </SUB>hydrocarbyl). Such compounds have excellent film-forming characteristics at low temperatures. These films, particularly in the case of silicon nitride and silicon oxynitride, also have excellent handling characteristics.
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| 申请公布号 |
US7064083(B2) |
申请公布日期 |
2006.06.20 |
| 申请号 |
US20050222361 |
申请日期 |
2005.09.08 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
DUSSARRAT CHRISTIAN;GIRARD JEAN-MARC |
| 分类号 |
C07F7/02;H01L21/31;C07F7/10;C23C16/34 |
主分类号 |
C07F7/02 |
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